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Eos200 6&8’EPI thickness measurement on Si Substrate
Eos200, part of Avant Semi’s series of automated epitaxial film thickness and element measurement systems, features high speed wafer transportation, robust and innovative modular optical system design with high throughput and low level of operating cost and maintenance. It is also designed with state-of-the-art GEM/SECS over Ethernet communications for standard clean environment operation.
Eos200 Description

Industry standard robotic wafer transport system with built-in pre-aligner

Modularly designed optical units with proven Avant Semi FTIR technology

Air cooled IR source and solid-state laser and moisture protection design allows lower cost of ownership (COO) and increased equipment uptime

Eos200 is fully SECS/GEM compliant; SECS interface supports local control operation as

well as remote control operation by the Host via HSMS/SECS-1 protocols.

User-friendly GUI with client server architecture allows fast data collection and two- or three-dimensions mapping

SEMI S2 certified


Contact-less measurement of epitaxial thickness by FTIR technique with very high operation throughput

Ability to determine epitaxial thickness on bulk or on patterned wafers such as silicon, SiC, GaAs, etc. It is also capable of measuring multiple grown epitaxial layers

Measurements are traceable to internal Golden Standards

Friendly user interface with convenient and fast recipe setup


Ability to sort between source and destination cassettes

Patented Fixed-Reference-on-Chuck standard without the need for background wafer

Dual robot arms with stage design allows high stability and throughput

Service-free interferometer with air cooled IR source and solid-state laser design provides high stability and lower PM time and lower COO

Optical system utilizes ZnSe beam splitter and window with room temperature DTGS detector which does not require nitrogen purge for moisture protection, resulting in lowered COO

Ability to provide certain customization for system software upon customer special request

  • Company Address
    Room 402, Building 1, No.570, Shengxia Road, Shanghai, China
  • Contact Details
    Service Hotline:Senior Sales Manager:Ryan 15895446509
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