Shanghai Youruipu Semiconductor Equipment Co., Ltd. (hereinafter referred to as "Youruipu") achieved another good result. Recently, the company's first domestic silicon carbide (SiC) epitaxial film thickness measurement FTIR equipment Eos 200Lite was officially delivered to customers.

FTIR is a measuring device that uses infrared spectroscopy by Fourier transform to analyze the thickness of various epitaxial layers and the concentration of elements, which can be used to measure the thickness of epitaxial layers, photoresist thickness and thickness after CMP polishing, and determine the concentration of various elements in semiconductor manufacturing processes. For a long time, the semiconductor FTIR market has been monopolized by international equipment manufacturers such as Nanometrics (now Onto innovation) and Thermo Fisher.

Eos200Lite is a member of the company's epitaxial film thickness and element concentration automatic measurement system, is a fully automatic, non-contact equipment designed for silicon carbide epitaxial film thickness measurement, using high-speed wafer transmission, innovative modular optical system design, etc., with the advantages of miniaturization, high capacity, low operation and maintenance costs. At the same time, the device user is user-friendly and suitable for standard cleaning environments. The product can integrate SECS/GEM functional modules to realize the docking with customer factory automation.

Previously, EURIP delivered the first self-developed semiconductor FTIR measurement device Eos200 to silicon epitaxy customers in June, which passed customer testing at the end of August and was officially launched on the client. EOS200 adopts modular design concept, which greatly reduces the customer's use and maintenance costs when the performance of the whole machine reaches the same level as foreign competitors. Thanks to superior supply chain resources, Unispectrum can significantly shorten equipment lead times.

Founded in 2021, Uripu is led by overseas returnees who have been engaged in the semiconductor industry for a long time, and cooperates with the domestic senior semiconductor front-end measurement equipment technical team, and is committed to creating high-quality semiconductor front-end measurement equipment. In August, Youruipu announced the completion of tens of millions of yuan in pre-A round financing, which is mainly used for the mass production of Eos200/EOS300, Selene and Helios series products and the development of new equipment for semiconductor FTIR (Fourier transform infrared spectroscopy) measurement equipment.