Variable frequency analysis supports CV characteristic analysis
at any frequency from 20kHz to 1MHz
A wide voltage range of 10mV to 2V can be detected to obtain
a more stable and reliable CV characteristic curve
Supports various sizes of wafers (4 '&6'&8 '&12'), fully supporting
silicon carbide wafers and silicon wafers
The independently developed CRT40 capacitance meter has good
stability and accuracy
Semi automatic solutions and fully automatic solutions that comply
with SEMI standards can also be customized flexibly according
to customer needs
In response to product pain points and customer improvement
suggestions, SICV equipment has been improved and
optimized accordingly
Advantage
High speed and high-precision operation control technology;
Fast and stable scanning: voltage capacitance curve scanning;
Algorithm framework: Eliminating noise signals;
Feature
Flexible customization of semi-automatic solutions and fully
automatic solutions that comply with SEMI standards
according to customer needs;
The independently developed CRT40 capacitance meter has
good stability and accuracy;
Frequency conversion analysis supports 20kHz to 1MHz;
Supports various sizes of wafers;
