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Eos300T 12 inch carbon oxygen concentration measurement equipment
The EOS300T is a member of the Urespec Elemental and Epitaxial Film Thickness Measurement System for 12-inch carbon and oxygen concentration measurements. It is characterized by high-speed wafer transfer, robust and innovative modular optical system design with high throughput, low operating costs and low maintenance levels. The product is designed with advanced GEM/SECS Ethernet communication and is suitable for standard clean environment operation.
Eos300T Description
  • Modular design of the optical unit, using the mature Unispec Fourier infrared technology;

  • Infrared light source and HeNe laser and moisture-resistant design reduce maintenance costs (Coo) and increase equipment uptime;

  • Equipped with Yourui Spectrum elemental analysis system;

  • Fully compliant with SECS/GEM standards, the SECS interface supports local control  operation, and the host remote control operation through HSMS/SECS-1 protocol;

  • The client-server architecture with a user-friendly interface allows for fast data collection and 2D or 3D imaging.

Advantage
FTIR technology is used to achieve non-contact measurement of elements with high operating capacity;

User-friendly interface, convenient and fast program settings;

Features
Maintenance-free interferometer with infrared light source and HeNe laser design with high stability;

Lower maintenance time and lower maintenance costs;
The optical system adopts ZnSe beam splitter and a low-temperature MCT
detector;

We are able to provide corresponding customization for the system software according to the special requirements of customers.

  • Company Address
    Room 402, Building 1, No.570, Shengxia Road, Shanghai, China
  • Contact Details
    Market and Sales: sales@avantsemi.com.cn
    Job recruitment: talent@avantsemi.com.cn
    Service email: service@avantsemi.com.cn
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