Modular design of the optical unit, using the mature Unispec Fourier infrared technology;
Air-cooled infrared light source and moisture-resistant design reduce maintenance
costs (COO) and increase equipment uptime;
Fully compliant with SECS/GEM standards, the SECS interface supports local control
operation, and the host remote control operation through HSMS/SECS-1 protocol;
Client-server architecture with user-friendly interface allows for fast data collection and
2D or 3D imaging;SEMI S2 certified;
Advantage
The use of FTIR technology to achieve non-contact measurement of epitaxial thickness
with high operating capacity;
Ability to determine the epitaxial thickness on unpatterned or patterned wafers, and to
measure epitaxial layers with multiple layers grown;
Measurements traceable to the in-house gold standard;
User-friendly interface, convenient and fast program settings;
Features
FROC independent intellectual property rights, no need for additional reference wafers;
The optical system adopts ZnSe beam splitter and room temperature DTGS detector,
which does not require nitrogen purging to remove water, effectively reducing maintenance costs;
Able to provide corresponding customization for system software according to the special
requirements of customers;
