Eos200Lite, the first domestic SiC epitaxial film thickness measurement FTIR equipment, was officially delivered to customers
Eos200Lite is a member of the company's epitaxial film thickness and element concentration automatic measurement system, is a fully automatic, non-contact equipment specially designed for silicon carbide epitaxial film thickness measurement, using high-speed wafer transmission, innovative modular optical system design, etc., with the advantages of miniaturization, high capacity, low operating and maintenance costs.
2022-12-05
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